Transition Metal Dichalcogenides
MoS₂
Molybdenum Disulfide
Metal Precursor:
Mo(CO)₆
Chalcogen Precursor:
H₂S
Growth Temp:
700-850°C
WS₂
Tungsten Disulfide
Metal Precursor:
W(CO)₆
Chalcogen Precursor:
H₂S
Growth Temp:
500-1000°C
MoSe₂
Molybdenum Diselenide
Metal Precursor:
Mo(CO)₆
Chalcogen Precursor:
H₂Se
Growth Temp:
500-1000°C
WSe₂
Tungsten Diselenide
Metal Precursor:
W(CO)₆
Chalcogen Precursor:
H₂Se
Growth Temp:
500-1000°C
Process Parameter Comparison
| Material | Metal Precursor | Chalcogen Precursor | Temperature Range | Pressure Range |
|---|---|---|---|---|
| MoS₂ | Mo(CO)₆ | H₂S | 700-850°C | Tens to hundreds of Torr |
| WS₂ | W(CO)₆ | H₂S | 500-1000°C | Tens to hundreds of Torr |
| MoSe₂ | Mo(CO)₆ | H₂Se | 500-1000°C | Tens to hundreds of Torr |
| WSe₂ | W(CO)₆ | H₂Se | 500-1000°C | Tens to hundreds of Torr |